发明名称 SILVER ALLOY SPUTTERING TARGET FOR FORMING REFLECTION LAYER OF OPTICAL RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To provide a silver alloy sputtering target for forming an Ag alloy reflection layer of an optical recoding medium such as an optical recording disk CD-RW, DVD-RAM. SOLUTION: The silver alloy sputtering target consists of: a silver alloy (1) having a composition containing, by mass, 0.5 to 5% Al, and one or more kinds selected from Ca, Be and Si by 0.005 to 0.05% in total, and the balance Ag; a silver alloy (2) having a composition containing 0.5 to 5% Al, and one or more kinds selected from Dy, La, Nd, Tb and Gd by 0.1 to 3% in total, and the balance Ag; or a silver alloy (3) having a composition containing 0.5 to 5% Al, and one or more kinds selected from Ca, Be and Si by 0.005 to 0.05% in total, and one or more kinds selected from Dy, La, Nd, Tb and Gd by 0.1 to 3% in total, and the balance Ag.
申请公布号 JP2003155558(A) 申请公布日期 2003.05.30
申请号 JP20010352591 申请日期 2001.11.19
申请人 MITSUBISHI MATERIALS CORP 发明人 MISHIMA TERUSHI
分类号 C23C14/34;C22C5/06;G11B7/24;G11B7/258;G11B7/26 主分类号 C23C14/34
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