| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To remove only a defect which needs to be corrected by avoiding an incorrect decision that a foreign substance sticking on a glass substrate is a short circuit defect. <P>SOLUTION: Electric inspection is performed (101) to specify a defect position (102) and a defect kind (103), reference point coordinates are calculated (104) to correct coordinates (105), and a defect is extracted from an image near the defect and compared with defect presence ranges previously registered by defect kinds to specify the defect to be corrected (106, 107, 108, and 109), thereby cutting the specified defect (110). <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
