SUBSTRATE TREATING APPARATUS FOR INCLUDING DUAL LAYERS BAKE UNIT OF CONVEYOR TYPE AND METHOD OF THE SAME

摘要

PURPOSE: A substrate processing apparatus including multi-stage bake unit of conveyor type and a processing method thereof are provided to reduce the installation space by stacking the bake units of conveyor type and by arranging the bake units with the coater unit in parallel. CONSTITUTION: A coater unit(124) processes the coating progress of the substrate. The first bake unit of the conveyor type processes the first bake process while transferring the substrate before the coating progress. The second bake unit of the conveyor type is stacked with the first bake unit each other. The second bake unit of the conveyor type processes the second bake process while transferring the first baked substrate.