Substrate treating apparatus

摘要

A substrate treating apparatus includes a loading section 1, a treating tank 2, a rinsing tank 4, a drying tank 5, an unloading section 6, and a pair of endless belt members 7 for transporting substrates successively through the loading section 1, treating tank 2, rinsing tank 4, drying tank 5 and unloading section 6. The substrate treating apparatus further includes a fixing mechanism for fixing a pair of side edges of each substrate parallel to a transport direction of the substrate to the endless belt members 7. In the loading section 1, a plurality of substrates are fixed, each with the pair of edges thereof parallel to the transport direction fixed at constant intervals to the pair of endless belt members 7. The substrates having undergone the treatment are removed from the pair of endless belt members 7 in the unloading section 6.

主权项

1. A substrate treating apparatus for simultaneously treating both surfaces of a flexible rectangular substrate by horizontally transporting the substrate and supplying a treating solution to both the surfaces of the substrate, comprising:
a pair of endless belts for supporting a pair of side edges parallel to a transport direction of the substrate; and a fixing device for fixing the pair of side edges of the substrate parallel to the transport direction to the pair of endless belts; wherein the fixing device comprises a pair of magnets for pinching the endless belts and the side edges parallel to the transport direction of the substrate; and wherein said pair of magnets comprises a plurality of pairs of magnets at positions along said side edges parallel to the transport direction; wherein the fixing device further comprises a pair of feeders for supplying said pairs of magnets to said positions for pinching the endless belt members and the side edges of the substrate parallel to the transport direction; and contact members for contacting and removing the pairs of magnets pinching the endless belt members and the side edges of the substrate parallel to the transport direction from said positions.