Threaded dispense nozzle and alignment method and device for photoresist and other fluid coaters

摘要

Provided is a fluid dispensing system with a dispense nozzle with a threaded outer surface and a fluid dispensing apparatus with a movable dispenser arm with an opening that includes threaded inner walls that receive the dispense nozzle therein. Also provided is a method for aligning a dispense head in a coating tool. Horizontal alignment is achieved by rotating the dispense nozzle until its tip is in contact with the chuck then laterally adjusting the dispenser arm position so that the tip is positioned over a center of the chuck. Vertical alignment is achieved by rotating the dispense nozzle until an indicia of the dispense nozzle is at the same vertical location as a designated physical feature of the dispenser arm.

主权项

1. A method comprising:
coupling a dispense nozzle of a fluid dispensing apparatus to an opening of a movable dispenser arm of said fluid dispensing apparatus by rotating said dispense nozzle such that threaded outer walls of said dispense nozzle mate with threaded inner walls of said opening; and positioning said dispense nozzle and said dispenser arm with respect to a chuck of said fluid dispensing apparatus by rotating said dispense nozzle until said tapered tip of said dispense nozzle is substantially in contact with said chuck, said chuck for receiving a substrate thereon, wherein said dispense nozzle includes an upper straight portion with a constant outer diameter and said threaded outer walls, a lower portion that tapers to a tapered tip and an intersection between said upper straight portion and said lower portion, said lower portion including a maximum outer diameter no greater than said constant outer diameter.