LIQUID TREATMENT MODULE, APPARATUS AND METHOD FOR TREATING A SUBSTRATE WITH THE SAME

摘要

The present invention relates to a liquid treatment module, and a device and a method for treating a substrate including the same. According to an embodiment of the present invention, the liquid treatment module comprises: a transferring unit including a first transferring member configured to transfer a substrate in a first direction while horizontally maintaining the substrate, and a second transferring member located in a lower stream of the first transferring member and configured to transfer the substrate to a rocking unit which rocks about an axis parallel with the first direction; and a first liquid supply member installed in an upper portion of the first transferring member and supplying a first liquid to the substrate.