发明名称 MANUFACTURING METHOD FOR SOLAR BATTERY SUBSTRATE, AND SOLAR BATTERY SUBSTRATE
摘要 This manufacturing method for a solar battery substrate comprising single-crystal silicon is characterized by comprising: a step for producing a silicon single-crystal ingot; a step for cutting out a silicon substrate from the silicon single-crystal ingot; and a step for low-temperature heat-treating the silicon substrate at a temperature of at least 800°C but less than 1200°C, wherein before the low-temperature heat-treatment, the silicon single-crystal ingot or the silicon substrate is high-temperature heat-treated for at least 30 seconds at a temperature of at least 1200°C. As a result, a manufacturing method for a solar battery substrate with which it is possible to prevent a reduction in the lifetime of the substrate, even if the oxygen concentration of the substrate is high, is provided.
申请公布号 WO2016110891(A1) 申请公布日期 2016.07.14
申请号 WO2015JP05846 申请日期 2015.11.25
申请人 SHIN-ETSU CHEMICAL CO.,LTD. 发明人 OTSUKA, HIROYUKI;SHIRAI, SHOZO
分类号 H01L31/18;H01L21/22;H01L21/316;H01L21/324;H01L31/068 主分类号 H01L31/18
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