发明名称 OPTICAL MODULATOR CALIBRATION METHOD, DRAWING METHOD, AND DRAWING DEVICE
摘要 PROBLEM TO BE SOLVED: To shorten time necessary for calibration of an optical modulator.SOLUTION: A light receiving surface 510 of a light reception part 51 in which a plurality of light receiving elements 511 is two-dimensionally arranged is disposed at an irradiation position irradiated with light from an optical modulator having a plurality of optical modulation elements arranged at fixed pitches in one arrangement direction. By setting, among the plurality of optical modulation elements, an element group including two optical modulation elements separated from each other by a pitch larger by twice or more than the abovementioned pitch in an ON state, an inclined angle between a direction on the light receiving surface corresponding to the arrangement direction and a predetermined reference direction is obtained. A target light receiving element superimposed on an irradiation region 71 on the light receiving surface irradiated with light from each optical modulation element is specified on the basis of the inclined angle, and the setting value of a driving signal for the optical modulation element is adjusted on the basis of the output of the target light receiving element while individually setting each optical modulation element in an ON state.SELECTED DRAWING: Figure 5
申请公布号 JP2016133726(A) 申请公布日期 2016.07.25
申请号 JP20150009621 申请日期 2015.01.21
申请人 SCREEN HOLDINGS CO LTD 发明人 TAKAGI YOSHINORI;KITA TAIGA
分类号 G02B26/02;G03F7/20;H01L21/027 主分类号 G02B26/02
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