| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a discharge plasma electrode equipped with a mechanism which can efficiently cool the electrode from the outside without providing a duct line for a cooling medium within the electrode, and a discharge plasma treatment apparatus using this electrode. <P>SOLUTION: The discharge plasma electrode is equipped with a cooling fin composed of metal projections on a back surface of an electrode discharge surface and has such a cooling mechanism as a cooling medium is sprayed on the back surface of the electrode discharge surface. The electrode can be very thinned to save the weight thereof. The discharge plasma treatment apparatus uses this discharge plasma electrode as at least one of a pair of plasma discharge electrodes. <P>COPYRIGHT: (C)2003,JPO |
