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发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS64285(A)
申请公布日期
1989.01.05
申请号
JP19870155871
申请日期
1987.06.23
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
KAWAGUCHI TAKAO;MINAMINO YUTAKA;OOKAWA NORIKO;TAKEDA YOSHIYA;NAGATA SEIICHI
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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