| 摘要 |
PURPOSE:To suppress the humidity dependence property of a gas sensor and to enhance detection accuracy, by adding molybdenum oxide or tungsten oxide to the gas sensor using SnO2 as a metal oxide semiconductor. CONSTITUTION:Molybdenum oxide or tungsten oxide is added to a gas sensor using SnO2 as a metal oxide semiconductor. The addition amount of molybde num oxide or tungsten oxide is 0.1-25% on the basis of an atomic ratio of Mo/Sn or W/Sn, most pref., 0.2-10%. By this constitution, humidity dependence is suppressed and detection accuracy can be enhanced.
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