| 摘要 |
PURPOSE:To obtain a soft magnetic thin film with improved high-frequency characteristics and high saturation magnetic flux density and to enable it to meet a high coercive force magnetic recording media, high-frequency recording etc., by laminating a soft magnetic thin film with a particular composition and hetero amorphous 2-phase structure and a non-magnetic thin film. CONSTITUTION:A soft magnetic thin film 1 with MxLyJz composition (M represents at least one kind out of Fe, Co, and Ni, and L and J represents mutually different elements which are selected from B, C, and Si. Also, x, y, and z express the ratio of each element by the atomic %. x+y+z=100, y+z>=10, xnot equal to 0, ynot equal to 0, znot equal to 0) and hetero amorphous 2-phase structure and a non- magnetic thin film 2 are laminated. For example, a Fe-Co-BC 2-phase amorphous film 1 and an SiO2 film 2 are alternately built on photoceram substrate by the sputter method for laminated structure. Then, the film thickness of the 2-phase amorphous film 1 which is the magnetic film is 4.2mum each and six layers are built. The film thickness of the SiO2 film 2 between layers is 3000Angstrom . |
