| 摘要 |
PURPOSE:To perform working in the air and to simplify the constitution by using a laser as the light source and moving a table on which a work is placed. CONSTITUTION:A He-Cd laser 1 is used as the light source, and the laser light emitted from the He-Cd laser 1 is so controlled by an acoustooptic modulating element (AOM) and a laser power monitor 7 that the output is fixed. The laser light is modulated by an AOM 8 for signal modulation, and the modulated laser light is finally led to an optical head 4 and is condensed on a work 10. The optical head 4 is fixed on a table 2 which can be moved in the X direction, and the work 10 is fixed to a table 3 which can be moved in the Y direction orthogonal to the X direction. Thus, exposure to light is performed in the air, and the constitution is simplified. |
