DOPING METHOD FOR IMPURITY,申请号JP19920237916-传众专利搜索

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发明名称	DOPING METHOD FOR IMPURITY
摘要
申请公布号	JPH0684969(A)	申请公布日期	1994.03.25
申请号	JP19920237916	申请日期	1992.09.07
申请人	NEC CORP	发明人	SONE SHUJI
分类号	C30B23/08;H01L21/203;H01L21/363;(IPC1-7):H01L21/363	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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