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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06342791(A)
申请公布日期
1994.12.13
申请号
JP19930152801
申请日期
1993.05.31
申请人
SONY CORP
发明人
KITAHARA YOSHIHISA
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;(IPC1-7):H01L21/320
主分类号
H01L21/302
代理机构
代理人
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地址
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