| 摘要 |
PROBLEM TO BE SOLVED: To make an apparatus simplified, small-sized, high speed, and less expensive by a constitution in which the delivery of a disk is conducted by using two units of a single disk transfer device having a transfer arm for a spin shake-off device which shakes excess paint off by the high speed rotation of the disk. SOLUTION: A disk (d) mounted on the receiving base of a turn table 11, in which a reflection membrane is formed by a sputter film forming device, to which a protective film forming paint is supplied by a paint supply device 13, is transferred to a disk delivery position d5. A pair of spin shake-off devices 17, 17' is provided at positions relatively close to the second turn table 11, and a disk transfer device having a pair of transfer arms 15a, 15b is installed between them. By the alternating vertical motion and revolving motion of the arms 15a, 15b, the disk (d) at the position d5 is transferred alternately to the spin shake-off devices so that the rate of the change in the form of a liquid film supplied in a wheel shape is restricted. |
