| 摘要 |
PROBLEM TO BE SOLVED: To obtain highly reliable three-dimensional-system acceleration sensor comprising a single element by performing the polarization processing, which can detect the acceleration components of X, Y and Z axes, in a ring-shaped piezoelectric element, and forming a corresponding divided acceleration- component detecting electrode. SOLUTION: When accleration is applied, inertial forces reverse to the acceleration act on component-detecting spindles 12a and 13a of respective axes for the two-dimensiona accelerations of the X and Y axes. Thus, shearing forces are applied to the X-axis and Y-axis component detecting parts constituted in a piezoelectric element 11. As a result, the potentials are generated at electrodes 12 and 13 of the X and Y axes. the magnitudes and the azimuths of the acceleration can be obtained by the vector synthesis of the potentials generated in the X axis and the Y axis. For the acceleration in the direction of the Z axis, the reverse inertial force acts on a metal base 10, which is supported by the central part, and the piezoelectric element 11 attached on the base 10 as the same way as in the two-dimensional component, and deflection stress is applied. As a result, the potential is generated at an electrode 14. |
