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发明名称
OPTICAL MEASUREMENT WINDOW APPARATUS WITH ANTI-CONTAMINATION MECHANISM
摘要
申请公布号
JPH1090167(A)
申请公布日期
1998.04.10
申请号
JP19960250193
申请日期
1996.09.20
申请人
MITSUBISHI HEAVY IND LTD
发明人
DEGUCHI YOSHIHIRO
分类号
G01N21/84;G01N21/15;G02B27/00;(IPC1-7):G01N21/15
主分类号
G01N21/84
代理机构
代理人
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