Imaging micro ellipsometer

摘要

The ellipsometer arrangement illuminates a sample under a defined angle of incidence with light of a defined polarization. A detector system (8) is equipped with an imaging optics of high numerical aperture, N. The observation angle is smaller than the illumination angle ( ETA ), according to the function : observation angle = ETA - arcsin (N) + DELTA alpha , whereby DELTA alpha depends on the quality of the optics used. The light reflected by the sample is evaluated in reference to its intensity and polarization.