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发明名称
PROBE CONTROL METHOD AND DEVICE FOR LINEAR VOICE COIL ACTUATOR
摘要
申请公布号
JPH11316608(A)
申请公布日期
1999.11.16
申请号
JP19980346196
申请日期
1998.12.04
申请人
SYST MACH AUTOM COMPONENTS CORP;SMC CORP
发明人
NEFF EDWARD A;SHEAFFER MICHAEL S;FERRIS MICHAEL A;HUANG DAVID;HAIDOS STEVE;BOYLE KIERAN;STOM DENNIS
分类号
G05D3/12;G05B19/39;(IPC1-7):G05D3/12
主分类号
G05D3/12
代理机构
代理人
主权项
地址
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