PORT DOOR RETENTION AND EVACUATION SYSTEM

摘要

A system is disclosed for retaining a pod door (22) on a port door (26) at a load port, and for removing contaminants, particulates and/or gasses from between the pod and port door (26) surfaces and from within the interior of the pod door (22). According to a preferred embodiment of the present invention, a vacuum source (36) may be provided within, adjacent to, or remote from a process tool, which vacuum source (36) is connected to a vacuum port (34) in the front surface of a port door (26). The vacuum is provided to produce a negative pressure between juxtaposed surfaces of the port (26) and pod (22) doors.