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发明名称
A MOVABLE MICRO-ELECTROMECHANICAL DEVICE
摘要
申请公布号
EP1508142(A1)
申请公布日期
2005.02.23
申请号
EP20030729176
申请日期
2003.05.27
申请人
HEWLETT-PACKARD DEVELOPMENT COMPANY, L.P.
发明人
WALMSLEY, ROBERT G.;MILLIGAN, DONALD J.
分类号
G11B9/14;G11B9/00;G11B9/04;G11B33/08;(IPC1-7):G11B9/10
主分类号
G11B9/14
代理机构
代理人
主权项
地址
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