SOUND DETECTION MECHANISM

摘要

A sound detection mechanism in which distortion of a diaphragm is suppressed while controlling the thickness thereof to form a diaphragm having a required thickness. In the sound detection mechanism, a pair of electrodes forming a capacitor are provided on a substrate A, wherein one electrode out of the pair of electrodes is a back electrode C having a through hole Ca corresponding to an acoustic hole and the other electrode is the diaphragm B. The diaphragm B is provided for the substrate A and the back electrode C is provided oppositely to the diaphragm B through an air gap F while being supported by the substrate A, wherein the back electrode C is formed of polysilicon 5-20 mum in thickness.