发明名称 Seed and seedholder combinations for high quality growth of large silicon carbide single crystals
摘要 A silicon carbide seeded sublimation method is disclosed. The method includes the steps of nucleating growth on a seed crystal growth face that is between about 1° and 10° off-axis from the (0001) plane of the seed crystal while establishing a thermal gradient between the seed crystal and a source composition that is substantially perpendicular to the basal plane of the off-axis crystal.
申请公布号 US7364617(B2) 申请公布日期 2008.04.29
申请号 US20070671015 申请日期 2007.02.05
申请人 CREE, INC. 发明人 MUELLER STEPHAN;POWELL ADRIAN;TSVETKOV VALERI F.
分类号 C30B11/14;C30B23/00;C30B29/36 主分类号 C30B11/14
代理机构 代理人
主权项
地址