| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a working device capable of efficiently carrying out cutting by a cutting blade and polishing by a polishing wheel and a working tool used for the working device. <P>SOLUTION: This working device is furnished with a chuck table to hold a work, a rotary spindle a working means of which is supported on spindle housing free to rotate including the working means to work the work held on the chuck table, a tool mount installed on an end part of the rotary spindle and the working tool installed on the tool mount. The working tool is constituted of a disc type base, the cutting blade installed by projecting outward in the diametrical direction out of an outer periphery of the base and the ring type polishing wheel installed by projecting in the axial direction from a side surface of an outer peripheral part of the base. This working device is also furnished with an ultrasonic oscillator arranged on the base of the working tool and a voltage applying means to apply alternating current voltage to the ultrasonic oscillator. <P>COPYRIGHT: (C)2009,JPO&INPIT</p> |
