| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a member to be hot-pressed which has reduced deviation in flatness and parrallelism even when heated, and can maintain excellent profile regularity even when used. <P>SOLUTION: The ceramic member consists of a ≥50 vol.% bonding glass phase consisting of crystalline Si<SB>3</SB>N<SB>4</SB>ceramics, and Si, Y, Mg, O, Al, and O, and has a porosity of ≤0.5 vol.%. Alternatively, the ceramic member consists of a bonding glass phase consisting of an α-Si<SB>3</SB>N<SB>4</SB>phase in which a part of Si<SB>3</SB>N<SB>4</SB>is replaced with Y, Mg, O, and Al, and a β-Si<SB>3</SB>N<SB>4</SB>phase in which a part of Si<SB>3</SB>N<SB>4</SB>is replaced with O, and Al, and the volume ratio between the α-Si<SB>3</SB>N<SB>4</SB>phase and the β-Si<SB>3</SB>N<SB>4</SB>phase satisfies 5≤α/(α+β)≤50 (vol.%). <P>COPYRIGHT: (C)2003,JPO |
