Apparatus and method to aid in the reproducible and reversible tensioning of flexible substrates, such as polyimide or other file, to ensure planarity before, during, and after processing while mounted in tensioning apparatus.
申请公布号
WO2009076045(A1)
申请公布日期
2009.06.18
申请号
WO2008US84467
申请日期
2008.11.24
申请人
UNIVERSAL INSTRUMENTS CORPORATION;HARVILCHUCK, LAURENCE, A.;WESTBY, GEORGE, R.
