| 发明名称 |
AN APPARATUS AND METHOD FOR DIAGNOSTICS OF NETURAL RADICALS IN PLASMA |
| 摘要 |
An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising: a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe. |
| 申请公布号 |
US2016198558(A1) |
申请公布日期 |
2016.07.07 |
| 申请号 |
US201414912035 |
申请日期 |
2014.07.30 |
| 申请人 |
NANYANG TECHNOLOGICAL UNIVERSITY |
发明人 |
CHAN Chia Sern;XU Shuyan;RUTKEVYCH Pavlo;XU Luxiang |
| 分类号 |
H05H1/00;H01J37/32 |
主分类号 |
H05H1/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising:
a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising
a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and
an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe. |
| 地址 |
Singapore SG |
