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发明名称
摘要
申请公布号
JPH01130151(U)
申请公布日期
1989.09.05
申请号
JP19880026312U
申请日期
1988.02.29
申请人
发明人
分类号
G03F1/00;H01L21/027;H01L21/205;H01L21/30;H01L21/31;(IPC1-7):G03F1/00
主分类号
G03F1/00
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