| 摘要 |
PURPOSE:To keep a gas laser device always locked in a vertical mode by injection by a method wherein the tuning control of the gas laser device is carried out basing on a detection signal obtained by monitoring the inner gas pressure of a discharge section. CONSTITUTION:A gas pressure sensor 10 which detects gas pressure is provided inside a discharge section 3 of a slave laser 9 to measure the inner pressure of the discharge section 3. The measured value is transmitted to a computer 11 which serves as a control means. The computer 11 controls a piezo-driver 8 basing on the measured value of the sensor 10, the driver 8 varies a piezoelement 7 connected to the driver 8 in thickness to keep the resonator of the slave laser 9 constant in optical length. By this setup, when the tuning control of a gas laser device is carried out, the gas laser device can always be kept locked in a vertical mode by injection. |
