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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0411770(A)
申请公布日期
1992.01.16
申请号
JP19900112526
申请日期
1990.04.28
申请人
SONY CORP
发明人
KAYAMA SHIGEKI
分类号
H01L27/11;H01L21/28;H01L21/8244
主分类号
H01L27/11
代理机构
代理人
主权项
地址
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