发明名称 Method and apparatus for manufacturing needle shaped materials and method for manufacturing a microemitter
摘要 A method and apparatus exists for manufacturing needle-shaped materials for use as microemitters, wherein a light beam output from a light source is split into a plurality of beams and the split light beams are focused by an optical system and directed into a chamber having a gas containing electroconductive molecules. The electroconductive molecules are degraded through excitation by the beams directed into the chamber to deposit needle-shaped materials on a substrate disposed in the chamber. By so doing, a plurality of needle-shaped materials are simultaneously produced on the substrate in accordance with a corresponding number of beams obtained through splitting.
申请公布号 US5509843(A) 申请公布日期 1996.04.23
申请号 US19940246332 申请日期 1994.05.19
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 AKAMA, YOSHIAKI
分类号 H01J1/30;H01J1/304;H01J3/02;H01J9/02;(IPC1-7):H01J1/30 主分类号 H01J1/30
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