| 摘要 |
PURPOSE: To obtain the concentration-distribution measuring apparatus, of a plurality of dissolved substances, by which the distribution in the line direction of the concentration of the plurality of dissolved substances is measured by a single sensor and a single processing part and by which the distribution of the dissolved substances can be output as an image. CONSTITUTION: A sensing part 2 which is composed of a plurality of areas 2a to 2d partitioned respectively in the longitudinal direction so as to respond to different substances is formed on one face of a semiconductor substrate 1, and the semiconductor substrate 1 is irradiated with light L for a probe. |
