| 摘要 |
PROBLEM TO BE SOLVED: To provide a laser oscillator wherein main electrodes can perform stable main discharging operation by providing preliminary ionizing electrodes to provide uniform preliminary ionization. SOLUTION: A laser tube 2 is provided with 2 pairs of main electrodes 12 and 13 so that a gas within the laser tube 2 is moved from left side to right. A pair of preliminary ionizing electrodes 21 are disposed at positions upstream of the main electrodes 12 of upstream side (left side) of a gas flow direction. These preliminary ionizing electrodes 21 are disposed as equally spaced from each other along an entire circumferential direction of the laser tube 2. The preliminary ionizing electrodes 21 are connected with an exclusive high-voltage A.C. power supply 22. Immediately before a voltage is applied to the main electrodes 12 and 13, an A.C. high voltage is applied from the A.C. power supply 22 to the preliminary ionizing electrodes 21 to cause generation of preliminary ionization. |
