| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas laser oscillator which, even when such a gas laser medium having a low destruction voltage as Ne gas is used, can efficiently oscillate without fluctuation and reduction of a laser output. SOLUTION: When electric energy accumulated in a main capacitor 8 is supplied as compressed to pin electrodes 4 and also to a pair of main electrodes 2 and 3, provision of such delay means as external pin electrodes 20 causes preliminary ionizing discharge generated by the pin electrodes 4 to be delayed in generation timing, so that a time duration from the generation of the preliminary ionizing discharge to generation of main discharge can be made narrow. Thus preliminary ionization effects similar to, e.g., when a He diluent gas is used can be obtained, so that laser oscillation can be efficiently carried out without fluctuation and reduction of a laser output. |
