| 摘要 |
PROBLEM TO BE SOLVED: To provide a stage control method, capable of optimizing speed, acceleration, etc., of a stage, reducing time between the end of a process such as drawing or inspecting operation to the start of movement of the stage to a next movement start point, and hence improving the throughput of a depicting unit or an inspection unit. SOLUTION: This method comprises the steps an operation instructing step 2 of setting operation conditions for a process step of performing drawing or inspecting operation while a stage is moving, setting operating conditions for a movement step of causing the stage to move to a next process step start point, and instructing to start a series of operations involving both the process step and the movement step continuously succeeding the process step, and a stage operation control step 3 for controlling a series of stage movements from a process start point to a movement step end point, using the precess step operating conditions and movement step operating conditions. |
