发明名称 SEMICONDUCTOR DEVICE AND MANUFACTURE THEREOF
摘要 PROBLEM TO BE SOLVED: To obtain a semiconductor device which can be suitably applied to a capacitor, especially a capacitor large in capacitance and occupying space. SOLUTION: A semiconductor device is equipped with an electrostatic capacity 100 formed on a silicon board. The electrostatic capacity 100 is divided into a plurality of unit electrostatic capacities 21, and the unit electrostatic capacities 21 are demarcated from each other with isolation insulating layers 20. Each unit electrostatic capacity 21 is equipped with a first electrode layer of impurity diffused layer formed inside the silicon substrate, a second electrode layer of conductive polysilicon layer, and a dielectric layer of silicon oxide interposed between the first and second electrode layer. The unit electrostatic capacity 21 are connected together in series with connection parts 41.
申请公布号 JP2000286383(A) 申请公布日期 2000.10.13
申请号 JP19990355889 申请日期 1999.12.15
申请人 SEIKO EPSON CORP 发明人 INABA SHOGO
分类号 H01L27/04;H01L21/00;H01L21/02;H01L21/822;H01L21/8242;H01L23/552;H01L27/08;H01L27/108;H01L29/76;H01L29/94;H01L31/119;(IPC1-7):H01L27/04 主分类号 H01L27/04
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