| 摘要 |
The plasma processing apparatus according to the present invention comprises a lower electrode 12 for supporting a wafer W in a chamber 11, shield member 19 for shielding an inside circumferential surface of the chamber 11 from a plasma for processing the wafer W, and a baffle plate 18 disposed in a gap between the shield member 19 and the lower electrode 12, and scattering and exhausting a gas in the chamber 11, a resin plate 20 being removably mounted on an inside circumferential surface of the shield member 19, and a circumferential compression stress being generated in the resin plate 20. |
