发明名称 METHOD FOR SYNTHESIZING CARBON NANOTUBE
摘要 <P>PROBLEM TO BE SOLVED: To provide a method for synthesizing improved carbon nanotubes (CNT). <P>SOLUTION: In the method for synthesizing carbon nanotubes 4 by catalytic vapor deposition of carbon from a vapor phase on a catalyst layer 3 formed on a support member 1, in order to alter the physical, chemical and/or electrically conductive properties of carbon nanotubes, ion beams 2 are used before, during and/or after formation of the carbon nanotubes 4. <P>COPYRIGHT: (C)2003,JPO
申请公布号 JP2003226509(A) 申请公布日期 2003.08.12
申请号 JP20020361296 申请日期 2002.12.12
申请人 ELECTROVAC FABRIKATION ELEKTROTECHNISCHER SPEZIALARTIKEL GMBH;IMS-IONEN MIKROFABRIKATIONS SYSTEME GMBH 发明人 TANG XINHE;MAUTHNER KLAUS;HAMMEL ERNST;LOESCHNER HANS;PLATZGUMMER ELMAR;STENGL GERHARD
分类号 B01J37/02;B01J37/16;C01B31/02;C23C16/04;C23C16/18;C23C16/26;C23C16/48;C23C16/513;C30B23/00;C30B33/00 主分类号 B01J37/02
代理机构 代理人
主权项
地址