发明名称 |
Initiating test runs based on fault detection results |
摘要 |
A method and apparatus are provided for initiating test runs based on a fault detection result. The method comprises receiving operational data associated with processing of a workpiece by a processing tool, processing the operational data to determine fault detection results; and causing a test run to be performed based on at least a portion of the fault detection results.
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申请公布号 |
US7581140(B1) |
申请公布日期 |
2009.08.25 |
申请号 |
US20020323529 |
申请日期 |
2002.12.18 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
PASADYN ALEXANDER J.;COSS, JR. ELFIDO;CUSSON BRIAN K.;JENKINS NAOMI M. |
分类号 |
G06F11/00 |
主分类号 |
G06F11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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