Capacitance-based pressure sensor including pressure vessel(s)

摘要

Techniques are described herein that perform capacitance-based pressure sensing using pressure vessel(s). A pressure vessel is an object that has a cross section that defines a void. The void has a shape that is configured to change based on a change of pressure difference between a cavity pressure in a cavity in which at least a portion of the pressure vessel is suspended and a vessel pressure in the pressure vessel. The pressure vessel may be formed in the shape of an enclosed loop (e.g., along a path that is perpendicular to the cross section), resulting in a looped pressure vessel. For instance, an end of the pressure vessel may be connected to another end of the pressure vessel to form the enclosed loop.

主权项

1. A pressure sensor comprising:
a semiconductor substrate that includes a first cavity; a pressure vessel having a cross section that defines a void, the void having a shape that is configured to change based on a change of pressure difference between a cavity pressure in the first cavity and a vessel pressure in the pressure vessel, at least a first portion of the pressure vessel suspended in the first cavity; and a capacitive structure coupled to the first portion of the pressure vessel, the capacitive structure configured to provide a first capacitance that changes with the shape of the void.