发明名称 Semiconductor device with multiple carrier channels
摘要 A semiconductor device includes a layered structure forming multiple carrier channels extending in parallel at different depths of the semiconductor device and a gate electrode having multiple gate fingers of different lengths penetrating the layered structure to reach and control corresponding carrier channels at the different depths. The semiconductor device also includes a carrier electrode having multiple carrier fingers of different lengths penetrating the layered structure to access the corresponding carrier channels. The carrier fingers are interdigitated with the gate fingers.
申请公布号 US9419121(B1) 申请公布日期 2016.08.16
申请号 US201514841940 申请日期 2015.09.01
申请人 Mitsubishi Electric Research Laboratories, Inc. 发明人 Teo Koon Hoo;Zhang Yuhao
分类号 H01L29/778;H01L29/20;H01L29/205;H01L29/423;H01L29/417;H01L29/40;H01L29/66 主分类号 H01L29/778
代理机构 代理人 Vinokur Gene;McAleenan James;Tsukamoto Hironori
主权项 1. A semiconductor device, comprising: a layered structure forming multiple carrier channels extending in parallel at different depths of the semiconductor device; a gate electrode having multiple gate fingers of different lengths penetrating the layered structure to reach and control corresponding carrier channels at the different depths; and a carrier electrode having multiple carrier fingers of different lengths penetrating the layered structure to access the corresponding carrier channels, wherein the carrier fingers are interdigitated with the gate fingers.
地址 Cambridge MA US