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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6396921(A)
申请公布日期
1988.04.27
申请号
JP19860243649
申请日期
1986.10.13
申请人
NEC CORP
发明人
NAGASAWA SHUICHI;WADA YOSHIFUSA
分类号
H01L21/302;H01L21/3065;H01L21/3205;H01L39/24
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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