| 摘要 |
<p>PURPOSE:To reduce the curling up of dust when an inert gas, etc., are introduced into the load locker and to prevent the deposition of dust on the surface of a wafer by providing a dust current buffer means at a gas injection part for introducing a gas into the load locker. CONSTITUTION:When the evacuated load lockers 3 and 4 are to be opened, a gas is introduced to return the pressure to atmospheric pressure. In this case, the gas current buffer means 11 and 21 are provided at the gas injection parts 3 and 4 for introducing the gas into the load lockers 3 and 4. As a result, when the evacuated load lockers are to be opened and the pressure is returned to atmospheric pressure by introducing the gas, the curling up of dust is reduced, and the deposition of dust on the surface of a water is prevented.</p> |
