METHOD OF FORMING PHOTOSENSITIVE LAYER AND APPARATUS FOR THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a photosensitive layer which enables the simultaneous coating of both surfaces of even a thick substrate having a thickness ranging from 0.1 mm to 0.8 mm thickness by a die coating method and by which the substrate having a uniform film thickness distribution in the substrate surface is stably obtained and the incorporation of foreign matters into a photosensitive layer is suppressed to the utmost.

SOLUTION: Before coating, the foreign matter stuck on the substrate is removed and the photosensitive layer is formed by moving at least one of the substrate and a coating liquid discharge means relatively to each other in a state that the end part of the substrate is held.

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