| 摘要 |
PROBLEM TO BE SOLVED: To optimize beam characteristics by rotating beam from a temporal integrator separated for an equal distance to a total focal distance of one pair of cylindrical lenses by means of a spatial integrator. SOLUTION: One pair of the same cylindrical lenses 13, 14 are aligned in a course of beam 10 and separated for an equal distance to a total focal distances. Since the cylindrical lenses 13, 14 are mechanically connected and rotated centering around a beam axis synchronously, beam is rotated twice during one complete rotation of a lens pair 13, 14. An output plane 28 of a hexagonal prism 27 arranged around a center of a spatial beam integrator 25 is aligned to a central axis 29, thereby the beam is refracted. The spatial beam integrator 25 is rotated in the same angular direction as the temporal beam integrator at a twice speed. Therefore, the angular direction of the spatial beam integrator 25 is adjusted at first when the temporal beam integrator 12 being static state. The beam 10 can attain optimal spatial characteristics since the angular position of the spatial beam integrator 25 is determined relative to the beam 10. |
