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发明名称
MANUFACTURE OF CAPACITOR FOR SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH09181272(A)
申请公布日期
1997.07.11
申请号
JP19960176748
申请日期
1996.07.05
申请人
L JII SEMICON CO LTD
发明人
JIYON MUUN CHIYOI
分类号
H01L27/04;H01L21/822;H01L21/8242;H01L27/108;(IPC1-7):H01L27/108;H01L21/824
主分类号
H01L27/04
代理机构
代理人
主权项
地址
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