| 摘要 |
<p>An automatic surface inspection apparatus (10) comprises a light source (12) that provides a coherent light beam (20) that is split (14) and then recombined in a prism (21) to generate an interference pattern. A cylindrical lens (26) projects the interference pattern onto the surface of a disk (30) as a line of light (50). A linear detection array (45) converts the reflected line of light into an electrical signal that has a magnitude which varies dependent upon the reflected light intensity. Defects present on the surface of the disk cause variations in the reflected light intensity manifested as differences in the electrical signal output by the detection array (45).</p> |
