申请人 |
SHIN-ETSU HANDOTAI CO., LTD., TOKIO/TOKYO, JP |
发明人 |
MORI, YOSHIYUKI, TAKASAKI-SHI, GUNMA-KEN, JP;KITAZAWA, YUKIHARU, ANNAKA-SHI, GUNMA-KEN, JP;KOJIMA, MASAHIDE, GUNMA-KEN, JP;SAKAI, TOMOYUKI, ANNAKA-SHI, GUNMA-KEN, JP;NISHIJO, EIICHI, TAKASHI-SHI, GUNMA-KEN, JP;TSUDA, NOBUHIRO, ANNAKA-SHI, GUNMA-KEN, JP;EBE, TADAYUKI, URAWA-SHI, SAITAMA-KEN, JP |