Micromechanical level sensor with rotated body derives inclination angle of sensor axis with respect to vertical from deflection of accelerometer subjected to centrifugal, gravitational and spring forces

摘要

The sensor derives inclination angle of sensor axis with respect to vertical from deflection of accelerometer subjected to centrifugal, gravitational and spring forces. The level sensor has a ring body (2) elastically mounted above a substrate by a spring arrangement (3a-3d), a drive (5a-5d) connected to the ring body to rotate it about the ring axis and an accelerometer (1a-1d) attached to the ring body via a second spring arrangement (121a-121d). The accelerometer is deflected by the centrifugal force caused by the rotary motions and the gravitational force acting along a sensor axis (AA') through the ring axis against the spring forces of both spring arrangements. An evaluation device detects the accelerometer deflection and derives the inclination angle of the sensor axis with respect to the vertical.